Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

Hajime Hirata, Masahiro Tadokoro, Nobuhiko Nakano, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Inductively coupled plasma (ICP) was shown to be characterized by a substantial degree of stepwise excitation due to a large density of metastable atoms and an even larger population of electrons. The kinetics of metastables strongly affects the structure of the discharge and we have applied laser absorption spectroscopy to establish the density profile of argon metastables Ar(1s5) in a single turn coil geometry. At the same time the radial profiles of the radiative Ar(3p5) state obtained by using a computer-aided tomography are significantly different indicating the effect of electron induced quenching and stepwise processes in kinetics of the two states.

Original languageEnglish
Pages (from-to)50-51
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume27
Issue number1
DOIs
Publication statusPublished - 1999

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computer aided tomography
argon
metastable atoms
kinetics
profiles
laser spectroscopy
excitation
absorption spectroscopy
electrons
coils
quenching
geometry

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon. / Hirata, Hajime; Tadokoro, Masahiro; Nakano, Nobuhiko; Petrović, Zoran Lj; Makabe, Toshiaki.

In: IEEE Transactions on Plasma Science, Vol. 27, No. 1, 1999, p. 50-51.

Research output: Contribution to journalArticle

Hirata, Hajime ; Tadokoro, Masahiro ; Nakano, Nobuhiko ; Petrović, Zoran Lj ; Makabe, Toshiaki. / Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon. In: IEEE Transactions on Plasma Science. 1999 ; Vol. 27, No. 1. pp. 50-51.
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