Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

Hajime Hirata, Masahiro Tadokoro, Nobuhiko Nakano, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Inductively coupled plasma (ICP) was shown to be characterized by a substantial degree of stepwise excitation due to a large density of metastable atoms and an even larger population of electrons. The kinetics of metastables strongly affects the structure of the discharge and we have applied laser absorption spectroscopy to establish the density profile of argon metastables Ar(1s5) in a single turn coil geometry. At the same time the radial profiles of the radiative Ar(3p5) state obtained by using a computer-aided tomography are significantly different indicating the effect of electron induced quenching and stepwise processes in kinetics of the two states.

Original languageEnglish
Pages (from-to)50-51
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume27
Issue number1
DOIs
Publication statusPublished - 1999 Jan 1

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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