Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy

H. Ra, Y. Taguchi, D. Lee, W. Piyawattanametha, O. Solgaard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

25 Citations (Scopus)

Abstract

This paper presents a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. A gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The imaging capability of the MEMS mirror is successfully demonstrated in a breadboard setup. Reflectance images with a field of view (FOV) of 344 μm × 417 μm are achieved at 8 frames per second. The transverse resolution is 3.94 μm and 6.68 μm for the horizontal and vertical dimensions, respectively.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages862-865
Number of pages4
Publication statusPublished - 2006 Oct 24
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Ra, H., Taguchi, Y., Lee, D., Piyawattanametha, W., & Solgaard, O. (2006). Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 862-865). [1627936] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).