Two-dimensional modeling of a microcell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source

Masaru Kurihara, Toshiaki Makabe

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

The basic characteristics of a micro-cell plasma in a gas mixture sustained by a high-frequency voltage source with a ring-shaped electrode are described in this article. The key to maintaining a microcell plasma is to reduce wall loss and increase plasma production. The advantage of a gas mixture of Ne/Xe is the increase of the plasma production rate in a low electric field compared to that in pure gas. As a result, a microcell plasma can be sustained by a lower applied voltage by using a gas mixture of Ne/Xe under the same power condition as compared with that in pure Xe.

Original languageEnglish
Pages (from-to)7756-7763
Number of pages8
JournalJournal of Applied Physics
Volume89
Issue number12
DOIs
Publication statusPublished - 2001 Jun 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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