Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma

Kazuhiro Kamimura, Katumi Iyanagi, Nobuhiko Nakano, Toshiaki Makabe

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

An inductively coupled plasma (ICP) is one of the candidates for a high density, large area and uniform plasma source for use in plasma processing even under low pressure conditions. We have developed a two-dimensional and time dependent model for a collision dominated ICP, taking into consideration electron transport in both the electric and magnetic fields, based on the relaxation continuum (RCT) model in a self-consistent manner. The 2D-space and time structure of an ICP, driven by a frequency of 13.56 MHz and a current amplitude of 10 A at 0.3 Torr in Ar is mainly discussed. In particular, a space potential with a double frequency time variation, at a plasma density of 1011 cm-3 is clarified as well as a potential distribution of the insulating wall of ICP. The importance of the power deposition by E1 × Bz drift of electrons in front of the side wall, in addition to E0 drift is pointed out in terms of the plasma maintenance.

Original languageEnglish
Pages (from-to)4429-4435
Number of pages7
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number7 B
Publication statusPublished - 1999 Jul

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Inductively coupled plasma
Plasma applications
Plasma sources
Plasma density
Electric fields
Magnetic fields
Plasmas
Electrons
plasma density
maintenance
electrons
low pressure
continuums
collisions
electric fields
magnetic fields

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma. / Kamimura, Kazuhiro; Iyanagi, Katumi; Nakano, Nobuhiko; Makabe, Toshiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 7 B, 07.1999, p. 4429-4435.

Research output: Contribution to journalArticle

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