Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma

Kazuhiro Kamimura, Katumi Iyanagi, Nobuhiko Nakano, Toshiaki Makabe

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

An inductively coupled plasma (ICP) is one of the candidates for a high density, large area and uniform plasma source for use in plasma processing even under low pressure conditions. We have developed a two-dimensional and time dependent model for a collision dominated ICP, taking into consideration electron transport in both the electric and magnetic fields, based on the relaxation continuum (RCT) model in a self-consistent manner. The 2D-space and time structure of an ICP, driven by a frequency of 13.56 MHz and a current amplitude of 10 A at 0.3 Torr in Ar is mainly discussed. In particular, a space potential with a double frequency time variation, at a plasma density of 1011 cm-3 is clarified as well as a potential distribution of the insulating wall of ICP. The importance of the power deposition by E1 × Bz drift of electrons in front of the side wall, in addition to E0 drift is pointed out in terms of the plasma maintenance.

Original languageEnglish
Pages (from-to)4429-4435
Number of pages7
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number7 B
Publication statusPublished - 1999 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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