Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma

Kazuhiro Kamimura, Katumi Iyanagi, Nobuhiko Nakano, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy