Two-dimensional self-consistent simulation of a DC magnetron discharge

Eiji Shidoji, Hiroto Ohtake, Nobuhiko Nakano, Toshiaki Makabe

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

Original languageEnglish
Pages (from-to)2124-2130
Number of pages7
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume38
Issue number4 A
Publication statusPublished - 1999

Fingerprint

direct current
Electrons
electrons
simulation
Fluids
fluids
Discharge (fluid mechanics)
Spatial distribution
Ionization
spatial distribution
Electric fields
ionization
electric fields
Ions
ions

Keywords

  • Discharge
  • Hybrid model
  • Magnetron sputtering
  • Plasma
  • Simulation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Two-dimensional self-consistent simulation of a DC magnetron discharge. / Shidoji, Eiji; Ohtake, Hiroto; Nakano, Nobuhiko; Makabe, Toshiaki.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 38, No. 4 A, 1999, p. 2124-2130.

Research output: Contribution to journalArticle

Shidoji, Eiji ; Ohtake, Hiroto ; Nakano, Nobuhiko ; Makabe, Toshiaki. / Two-dimensional self-consistent simulation of a DC magnetron discharge. In: Japanese Journal of Applied Physics, Part 2: Letters. 1999 ; Vol. 38, No. 4 A. pp. 2124-2130.
@article{57e64b51af0a47038d6fdef9cb109fa1,
title = "Two-dimensional self-consistent simulation of a DC magnetron discharge",
abstract = "A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.",
keywords = "Discharge, Hybrid model, Magnetron sputtering, Plasma, Simulation",
author = "Eiji Shidoji and Hiroto Ohtake and Nobuhiko Nakano and Toshiaki Makabe",
year = "1999",
language = "English",
volume = "38",
pages = "2124--2130",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "4 A",

}

TY - JOUR

T1 - Two-dimensional self-consistent simulation of a DC magnetron discharge

AU - Shidoji, Eiji

AU - Ohtake, Hiroto

AU - Nakano, Nobuhiko

AU - Makabe, Toshiaki

PY - 1999

Y1 - 1999

N2 - A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

AB - A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

KW - Discharge

KW - Hybrid model

KW - Magnetron sputtering

KW - Plasma

KW - Simulation

UR - http://www.scopus.com/inward/record.url?scp=33744767768&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33744767768&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:33744767768

VL - 38

SP - 2124

EP - 2130

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 4 A

ER -