### Abstract

A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

Original language | English |
---|---|

Pages (from-to) | 2131-2136 |

Number of pages | 6 |

Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |

Volume | 38 |

Issue number | 4 A |

Publication status | Published - 1999 |

### Fingerprint

### Keywords

- Discharge
- Hybrid model
- Magnetron sputtering
- Plasma
- Simulation

### ASJC Scopus subject areas

- Physics and Astronomy (miscellaneous)

### Cite this

*Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers*,

*38*(4 A), 2131-2136.

**Two-dimensional self-consistent simulation of a DC magnetron discharge.** / Shidoji, Eiji; Ohtake, Hiroto; Nakano, Nobuhiko; Makabe, Toshiaki.

Research output: Contribution to journal › Article

*Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers*, vol. 38, no. 4 A, pp. 2131-2136.

}

TY - JOUR

T1 - Two-dimensional self-consistent simulation of a DC magnetron discharge

AU - Shidoji, Eiji

AU - Ohtake, Hiroto

AU - Nakano, Nobuhiko

AU - Makabe, Toshiaki

PY - 1999

Y1 - 1999

N2 - A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

AB - A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

KW - Discharge

KW - Hybrid model

KW - Magnetron sputtering

KW - Plasma

KW - Simulation

UR - http://www.scopus.com/inward/record.url?scp=0001012331&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001012331&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0001012331

VL - 38

SP - 2131

EP - 2136

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 4 A

ER -