Two-dimensional transport of submicron particles in capacitively coupled plasma reactor

Ryu Ichi Hashido, Masao Hasebe, Yoshiyuki Hosokawa, Nobuhiko Nakano, Yukio Yamaguchi, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Two-dimensional transport of submicron particles in capacitively coupled plasma reactor'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science