TY - JOUR
T1 - Two orders agreement between stiffness measurement of µ-scale beam with analytical, macroscopic predictions
AU - Sato, Takaaki
AU - Hashiguchi, Gen
AU - Fujita, Hiroyuki
N1 - Funding Information:
Image 3 Hiroyuki Fujita received the B.S., M.S., and Ph.D. degrees in electrical engineering from The University of Tokyo, Tokyo, Japan, in 1975, 1977, and 1980, respectively. He has been the Director of the Advanced Research Laboratory, CANNON Medical Systems Corporation, Otawara, Japan, since 2017. He is also a Professor of Tokyo City University, Tokyo, and a Professor Emeritus of The University of Tokyo, where he served as a Professor with the Institute of Industrial Science for over 38 years. He was a Visiting Professor with MIT, Cambridge, MA, USA, and UC Berkeley, Berkeley, CA, USA. He is currently involved in the investigation of MEMS/NEMS and applications to bio/nanotechnology and IoT. He has published more than 350 academic papers. Dr. Fujita received many awards, including the l′Ordre des Palmes Academiques from the Government of France, Docteur Honoris Causa from the École Normale Supérieure de Cachan, the Prize for Science and Technology— Research Category from the Ministry of Education, Culture, Sports, Science and Technology, the Outstanding Achievement Award from the Institute of Electrical Engineers of Japan, and the IEEE Robert Bosch Award for MEMS.
Publisher Copyright:
© 2022 Elsevier B.V.
PY - 2022/4/16
Y1 - 2022/4/16
N2 - Miniaturization technology for creating three-dimensional structures is constantly advancing, reaching a processing accuracy of several µm. Therefore, it is questionable whether it is possible to obtain the stiffness of spring constant derived from macroscopic bending model and from macroscale parameters such as Young's modulus in this small region. To test the goodness of the macroscale model, we fabricated a micro-scale beam and an electrostatic actuator, applied an AC voltage to make the beam resonate, and measured the resonant frequency of the beam. The resonance frequencies were measured through changes in bias voltage. By the constant voltage dependence of the resonance frequency, we measured the soft-spring effect, and also measured the stiffness spring constant of the beam without the soft-spring effect. We demonstrate that the stiffness of a beam of a few µm can be accurately calculated from the macroscale analytical solution if the beam dimensions are known.
AB - Miniaturization technology for creating three-dimensional structures is constantly advancing, reaching a processing accuracy of several µm. Therefore, it is questionable whether it is possible to obtain the stiffness of spring constant derived from macroscopic bending model and from macroscale parameters such as Young's modulus in this small region. To test the goodness of the macroscale model, we fabricated a micro-scale beam and an electrostatic actuator, applied an AC voltage to make the beam resonate, and measured the resonant frequency of the beam. The resonance frequencies were measured through changes in bias voltage. By the constant voltage dependence of the resonance frequency, we measured the soft-spring effect, and also measured the stiffness spring constant of the beam without the soft-spring effect. We demonstrate that the stiffness of a beam of a few µm can be accurately calculated from the macroscale analytical solution if the beam dimensions are known.
KW - MEMS
KW - Resonant frequency
KW - Soft-spring effect
KW - Stiffness
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U2 - 10.1016/j.sna.2022.113448
DO - 10.1016/j.sna.2022.113448
M3 - Article
AN - SCOPUS:85124605898
VL - 337
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
M1 - 113448
ER -