Two orders agreement between stiffness measurement of µ-scale beam with analytical, macroscopic predictions

Takaaki Sato, Gen Hashiguchi, Hiroyuki Fujita

Research output: Contribution to journalArticlepeer-review

Abstract

Miniaturization technology for creating three-dimensional structures is constantly advancing, reaching a processing accuracy of several µm. Therefore, it is questionable whether it is possible to obtain the stiffness of spring constant derived from macroscopic bending model and from macroscale parameters such as Young's modulus in this small region. To test the goodness of the macroscale model, we fabricated a micro-scale beam and an electrostatic actuator, applied an AC voltage to make the beam resonate, and measured the resonant frequency of the beam. The resonance frequencies were measured through changes in bias voltage. By the constant voltage dependence of the resonance frequency, we measured the soft-spring effect, and also measured the stiffness spring constant of the beam without the soft-spring effect. We demonstrate that the stiffness of a beam of a few µm can be accurately calculated from the macroscale analytical solution if the beam dimensions are known.

Original languageEnglish
Article number113448
JournalSensors and Actuators A: Physical
Volume337
DOIs
Publication statusPublished - 2022 Apr 16
Externally publishedYes

Keywords

  • MEMS
  • Resonant frequency
  • Soft-spring effect
  • Stiffness

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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