Ultra-high cleanliness of ISO class minus 1 measured in triply connected clean-unit system platform

Md Dalilur Rahaman, Hideo Kaiju, Nobuyoshi Kawaguchi, Akira Ishibashi

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A clean environment ISO class minus 1 free of particulate contamination is realized in clean-unit system platform (CUSP), made of airtight multiply-connected clean-box unit with an air feedback loop, by stepwise reducing particles coming out from the high efficiency particulate air (HEPA) filter and a number of particles coming out through the filter of the particle counter due to the imperfect air filtration. The particles coming out from the HEPA filter to the CUSP environment are minimized by connecting the ultra low penetration air (ULPA) filter just after the HEPA filter. By decoupling the particle counter from the advanced CUSP unit, the contribution of the particle counter for deteriorating the cleanliness is significantly reduced. Experimental results from a double use of HEPA and ULPA filters and the separation of particle counter from the advanced CUSP unit, demonstrate the ultra-high cleanliness of ISO class minus 1, which would be the key factor for increasing the product yield and reliability in the burgeoning cross-disciplinary research.

Original languageEnglish
Pages (from-to)5712-5716
Number of pages5
JournalJapanese journal of applied physics
Volume47
Issue number7 PART 1
DOIs
Publication statusPublished - 2008 Jul 11
Externally publishedYes

Fingerprint

air filters
Air filters
cleanliness
Radiation counters
particulates
radiation counters
platforms
air
penetration
Air
decoupling
boxes
contamination
Contamination
Feedback
filters
products

Keywords

  • Biotechnology
  • Nanotechnology
  • Platform and cross-disciplinary research
  • Ultra-high cleanliness

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Ultra-high cleanliness of ISO class minus 1 measured in triply connected clean-unit system platform. / Rahaman, Md Dalilur; Kaiju, Hideo; Kawaguchi, Nobuyoshi; Ishibashi, Akira.

In: Japanese journal of applied physics, Vol. 47, No. 7 PART 1, 11.07.2008, p. 5712-5716.

Research output: Contribution to journalArticle

Rahaman, Md Dalilur ; Kaiju, Hideo ; Kawaguchi, Nobuyoshi ; Ishibashi, Akira. / Ultra-high cleanliness of ISO class minus 1 measured in triply connected clean-unit system platform. In: Japanese journal of applied physics. 2008 ; Vol. 47, No. 7 PART 1. pp. 5712-5716.
@article{a96eb91d48af495697f233b9cfdf2bff,
title = "Ultra-high cleanliness of ISO class minus 1 measured in triply connected clean-unit system platform",
abstract = "A clean environment ISO class minus 1 free of particulate contamination is realized in clean-unit system platform (CUSP), made of airtight multiply-connected clean-box unit with an air feedback loop, by stepwise reducing particles coming out from the high efficiency particulate air (HEPA) filter and a number of particles coming out through the filter of the particle counter due to the imperfect air filtration. The particles coming out from the HEPA filter to the CUSP environment are minimized by connecting the ultra low penetration air (ULPA) filter just after the HEPA filter. By decoupling the particle counter from the advanced CUSP unit, the contribution of the particle counter for deteriorating the cleanliness is significantly reduced. Experimental results from a double use of HEPA and ULPA filters and the separation of particle counter from the advanced CUSP unit, demonstrate the ultra-high cleanliness of ISO class minus 1, which would be the key factor for increasing the product yield and reliability in the burgeoning cross-disciplinary research.",
keywords = "Biotechnology, Nanotechnology, Platform and cross-disciplinary research, Ultra-high cleanliness",
author = "Rahaman, {Md Dalilur} and Hideo Kaiju and Nobuyoshi Kawaguchi and Akira Ishibashi",
year = "2008",
month = "7",
day = "11",
doi = "10.1143/JJAP.47.5712",
language = "English",
volume = "47",
pages = "5712--5716",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7 PART 1",

}

TY - JOUR

T1 - Ultra-high cleanliness of ISO class minus 1 measured in triply connected clean-unit system platform

AU - Rahaman, Md Dalilur

AU - Kaiju, Hideo

AU - Kawaguchi, Nobuyoshi

AU - Ishibashi, Akira

PY - 2008/7/11

Y1 - 2008/7/11

N2 - A clean environment ISO class minus 1 free of particulate contamination is realized in clean-unit system platform (CUSP), made of airtight multiply-connected clean-box unit with an air feedback loop, by stepwise reducing particles coming out from the high efficiency particulate air (HEPA) filter and a number of particles coming out through the filter of the particle counter due to the imperfect air filtration. The particles coming out from the HEPA filter to the CUSP environment are minimized by connecting the ultra low penetration air (ULPA) filter just after the HEPA filter. By decoupling the particle counter from the advanced CUSP unit, the contribution of the particle counter for deteriorating the cleanliness is significantly reduced. Experimental results from a double use of HEPA and ULPA filters and the separation of particle counter from the advanced CUSP unit, demonstrate the ultra-high cleanliness of ISO class minus 1, which would be the key factor for increasing the product yield and reliability in the burgeoning cross-disciplinary research.

AB - A clean environment ISO class minus 1 free of particulate contamination is realized in clean-unit system platform (CUSP), made of airtight multiply-connected clean-box unit with an air feedback loop, by stepwise reducing particles coming out from the high efficiency particulate air (HEPA) filter and a number of particles coming out through the filter of the particle counter due to the imperfect air filtration. The particles coming out from the HEPA filter to the CUSP environment are minimized by connecting the ultra low penetration air (ULPA) filter just after the HEPA filter. By decoupling the particle counter from the advanced CUSP unit, the contribution of the particle counter for deteriorating the cleanliness is significantly reduced. Experimental results from a double use of HEPA and ULPA filters and the separation of particle counter from the advanced CUSP unit, demonstrate the ultra-high cleanliness of ISO class minus 1, which would be the key factor for increasing the product yield and reliability in the burgeoning cross-disciplinary research.

KW - Biotechnology

KW - Nanotechnology

KW - Platform and cross-disciplinary research

KW - Ultra-high cleanliness

UR - http://www.scopus.com/inward/record.url?scp=55149092983&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=55149092983&partnerID=8YFLogxK

U2 - 10.1143/JJAP.47.5712

DO - 10.1143/JJAP.47.5712

M3 - Article

VL - 47

SP - 5712

EP - 5716

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7 PART 1

ER -