@inproceedings{323c9315c73148efaab48f43a40a3ccc,
title = "Ultra-precise complex refractive index measurement using dual-comb spectroscopy",
abstract = "We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.",
author = "Sumihara, {Kana A.} and Sho Okubo and Makoto Okano and Hajime Inaba and Shinichi Watanabe",
note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",
year = "2021",
language = "English",
series = "Optics InfoBase Conference Papers",
publisher = "The Optical Society",
booktitle = "CLEO",
address = "United States",
}