Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy

Kana A. Sumihara, Sho Okubo, Makoto Okano, Hajime Inaba, Shinichi Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.

Original languageEnglish
Title of host publication2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580910
Publication statusPublished - 2021 May
Event2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: 2021 May 92021 May 14

Publication series

Name2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings

Conference

Conference2021 Conference on Lasers and Electro-Optics, CLEO 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/5/921/5/14

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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