Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy

Kana A. Sumihara; Sho Okubo; Makoto Okano; Hajime Inaba; Shinichi Watanabe

Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy

Kana A. Sumihara, Sho Okubo, Makoto Okano, Hajime Inaba, Shinichi Watanabe

Department of Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.

Original language	English
Title of host publication	2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580910
Publication status	Published - 2021 May
Event	2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States Duration: 2021 May 9 → 2021 May 14

Publication series

Name	2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings

Conference

Conference	2021 Conference on Lasers and Electro-Optics, CLEO 2021
Country/Territory	United States
City	Virtual, Online
Period	21/5/9 → 21/5/14

ASJC Scopus subject areas

Computer Networks and Communications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy. / Sumihara, Kana A.; Okubo, Sho; Okano, Makoto et al.

2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sumihara, KA, Okubo, S, Okano, M, Inaba, H & Watanabe, S 2021, Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy. in 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings. 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2021 Conference on Lasers and Electro-Optics, CLEO 2021, Virtual, Online, United States, 21/5/9.

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title = "Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy",

abstract = "We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively. ",

author = "Sumihara, {Kana A.} and Sho Okubo and Makoto Okano and Hajime Inaba and Shinichi Watanabe",

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T1 - Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy

AU - Sumihara, Kana A.

AU - Okubo, Sho

AU - Okano, Makoto

AU - Inaba, Hajime

AU - Watanabe, Shinichi

PY - 2021/5

Y1 - 2021/5

N2 - We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.

AB - We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.

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M3 - Conference contribution

AN - SCOPUS:85120501898

T3 - 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings

BT - 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2021 Conference on Lasers and Electro-Optics, CLEO 2021

Y2 - 9 May 2021 through 14 May 2021

ER -

Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy

Abstract

Publication series

Conference

ASJC Scopus subject areas

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