TY - GEN
T1 - Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy
AU - Sumihara, Kana A.
AU - Okubo, Sho
AU - Okano, Makoto
AU - Inaba, Hajime
AU - Watanabe, Shinichi
N1 - Publisher Copyright:
© 2021 OSA.
PY - 2021/5
Y1 - 2021/5
N2 - We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.
AB - We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.
UR - http://www.scopus.com/inward/record.url?scp=85120501898&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85120501898&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85120501898
T3 - 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
BT - 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2021 Conference on Lasers and Electro-Optics, CLEO 2021
Y2 - 9 May 2021 through 14 May 2021
ER -