TY - JOUR
T1 - Ultra-precision cryogenic machining of viscoelastic polymers
AU - Kakinuma, Yasuhiro
AU - Kidani, Sinya
AU - Aoyama, Tojiro
N1 - Funding Information:
This work was subsidized by a Grant-in-Aid for Scientific Research (S) (No. 21226006 ) from the Ministry of Education, Culture, Sports, Science and Technology in Japan .
PY - 2012
Y1 - 2012
N2 - Microfluidic chips with micro- or nanoscale channels are currently in great demand. PDMS (polydimethylsiloxane), a viscoelastic polymer, has high transparency and good chemical stability, making it a suitable substrate material for such chips. However, it is difficult to machine PDMS by conventional cutting processes because of its high elasticity and adhesion. We proposed the cryogenic micromachining of PDMS completely immersed in liquid nitrogen as a direct process to fabricate customized 3D nano/microfluidic chips precisely. In this study, the feasibility of ultra-precision cryogenic machining is studied as an extended nanofabrication process.
AB - Microfluidic chips with micro- or nanoscale channels are currently in great demand. PDMS (polydimethylsiloxane), a viscoelastic polymer, has high transparency and good chemical stability, making it a suitable substrate material for such chips. However, it is difficult to machine PDMS by conventional cutting processes because of its high elasticity and adhesion. We proposed the cryogenic micromachining of PDMS completely immersed in liquid nitrogen as a direct process to fabricate customized 3D nano/microfluidic chips precisely. In this study, the feasibility of ultra-precision cryogenic machining is studied as an extended nanofabrication process.
KW - Cryogenic machining
KW - Polymer
KW - Ultra-precision machining
UR - http://www.scopus.com/inward/record.url?scp=84861648947&partnerID=8YFLogxK
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U2 - 10.1016/j.cirp.2012.03.039
DO - 10.1016/j.cirp.2012.03.039
M3 - Article
AN - SCOPUS:84861648947
SN - 0007-8506
VL - 61
SP - 79
EP - 82
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -