Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, K. Yamashita

Research output: Contribution to journalArticlepeer-review

Abstract

Electroless nickel is one of the best materials for making optical molding dies, because of its machinability with both single-point diamond turning and polishing, as well as its suitable hardness and durability. This paper deals with the ultra-precision polishing of aspheric molding dies for next-generation hard X-ray telescope mirrors, which require a super smooth surface with a roughness below 0.3 nm root-mean-square (rms). The material was machined using various methods, and a surface roughness of 0.23 nm rms was obtained on aspheric molding dies of 300 mm in diameter. A surface roughness of 0.16 nm rms was achieved on platinum/carbon multilayer mirrors, replicated from plano dies.

Original languageEnglish
Pages (from-to)337-340
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume57
Issue number1
DOIs
Publication statusPublished - 2008
Externally publishedYes

Keywords

  • Molding die
  • Optics
  • Polishing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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