Ultraflexible Transparent Oxide/Metal/Oxide Stack Electrode with Low Sheet Resistance for Electrophysiological Measurements

Yasutoshi Jimbo, Naoji Matsuhisa, Wonryung Lee, Peter Zalar, Hiroaki Jinno, Tomoyuki Yokota, Masaki Sekino, Takao Someya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Flexible, transparent electrodes are a crucial component for future implantable and wearable systems. For practical applications, conductivity and flexibility should be further improved to prevent signal attenuation, heat generation, and disconnection. Herein, we fabricate an ultraflexible transparent electrode with low sheet resistance (8.6 ω/sq) using an indium-tin-oxide/Au/indium-tin-oxide (ITO) multilayer on a 1 μm thick parylene substrate. The electrodes were foldable and when compared to pristine ITO displayed greater mechanical robustness. Applicability for large-area applications was confirmed through electrochemical impedance measurements, and the compatibility of electrode arrays for in vivo applications was demonstrated with an optogenetic experiment. As a result of the ultraflexible transparent electrode's excellent conformity to soft tissue, voltage signals induced by light stimulation directly below the electrode were successfully recorded on the moving muscle.

Original languageEnglish
Pages (from-to)34744-34750
Number of pages7
JournalACS Applied Materials and Interfaces
Volume9
Issue number40
DOIs
Publication statusPublished - 2017 Oct 11
Externally publishedYes

Keywords

  • flexibility
  • implantable device
  • indium-tin-oxide
  • neural recording
  • optogenetics
  • oxide/metal/oxide
  • transparent electrode
  • ultrathin metal

ASJC Scopus subject areas

  • Materials Science(all)

Fingerprint Dive into the research topics of 'Ultraflexible Transparent Oxide/Metal/Oxide Stack Electrode with Low Sheet Resistance for Electrophysiological Measurements'. Together they form a unique fingerprint.

  • Cite this