Ultrahigh-Q nanocavities fabricated by scanning probe microscope lithography on pre-patterned photonic crystal

Atsushi Yokoo, Takasumi Tanabe, Eiichi Kuramochi, Masaya Notomi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The attractiveness of a photonic crystal can be attributed to its unique optical characteristics. Specifically, the photonic crystal cavity provides strong light confinement, and enables the switching of light with very low threshold power. In a conventional process, to add this functionality, we have to modify its periodical structure during the CAD data processing step before electron beam lithography. This requirement limits the freedom of fabrication process. We can eliminate this limitation by taking advantage of the mode gap phenomena, with which we can furnish new cavity in the pre-patterned photonic crystal structure. The details of our cavity formation mechanism are described in reference 1). In Fig. 1(b), the pre-patterned structure is a line defect waveguide in a two-dimensional (2D) photonic crystal slab, and we assume that the refractive index is modulated in the yellow shaded region. A very small spatial index modulation (δn/n < 0.1%) changes the mode-gap edge frequency of the modified area to create barrier regions, while the unmodified area retains its original mode-gap edge frequency. As a result, an ultrahigh-Q cavity with a small volume can be created.

Original languageEnglish
Title of host publicationIEEE Photonic Society 24th Annual Meeting, PHO 2011
Pages324-325
Number of pages2
DOIs
Publication statusPublished - 2011 Dec 1
Externally publishedYes
Event24th Annual Meeting on IEEE Photonic Society, PHO 2011 - Arlington, VA, United States
Duration: 2011 Oct 92011 Oct 13

Publication series

NameIEEE Photonic Society 24th Annual Meeting, PHO 2011

Other

Other24th Annual Meeting on IEEE Photonic Society, PHO 2011
CountryUnited States
CityArlington, VA
Period11/10/911/10/13

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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    Yokoo, A., Tanabe, T., Kuramochi, E., & Notomi, M. (2011). Ultrahigh-Q nanocavities fabricated by scanning probe microscope lithography on pre-patterned photonic crystal. In IEEE Photonic Society 24th Annual Meeting, PHO 2011 (pp. 324-325). [6110558] (IEEE Photonic Society 24th Annual Meeting, PHO 2011). https://doi.org/10.1109/PHO.2011.6110558