Ultralow contact resistivity in annealed titanium edge contacts for multilayered graphene

Kazuyuki Ito, Takamasa Ogata, Tadashi Sakai, Yuji Awano

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end contacts can be lowered to 7.7 × 10-8 Ω cm2 by thermal annealing at 450 ° C, which is 2 orders of magnitude lower than that of conventional top-contact configurations, and to the best of our knowledge, it is the lowest value ever reported for a pristine MLG. X-ray photoelectron spectroscopy (XPS) measurements revealed the formation of covalent-bonded titanium carbide as an interface layer between the metal layer and MLG.

Original languageEnglish
Pages (from-to)25101
Number of pages1
JournalApplied Physics Express
Volume8
Issue number2
DOIs
Publication statusPublished - 2015 Feb 1

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Graphene
electric contacts
graphene
titanium
Titanium
electrical resistivity
titanium carbides
Titanium carbide
configurations
Metals
metals
Electric properties
X ray photoelectron spectroscopy
electrical properties
photoelectron spectroscopy
Annealing
annealing
x rays
Hot Temperature

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Ultralow contact resistivity in annealed titanium edge contacts for multilayered graphene. / Ito, Kazuyuki; Ogata, Takamasa; Sakai, Tadashi; Awano, Yuji.

In: Applied Physics Express, Vol. 8, No. 2, 01.02.2015, p. 25101.

Research output: Contribution to journalArticle

Ito, Kazuyuki ; Ogata, Takamasa ; Sakai, Tadashi ; Awano, Yuji. / Ultralow contact resistivity in annealed titanium edge contacts for multilayered graphene. In: Applied Physics Express. 2015 ; Vol. 8, No. 2. pp. 25101.
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