Abstract
A single point diamond turning technique for optical crystals is reported in this paper. The main factors influencing the machined surface quality are discovered and the regularities of the machining process are drawn. A new parameter Rs is introduced to evaluate the surface quality of diamond turned optical crystals. Under the optimized machining conditions, mirror surface of roughness value Ra 0.006 μm is obtained on single crystal germanium.
Original language | English |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
Editors | Victor J. Doherty |
Publisher | Publ by Society of Photo-Optical Instrumentation Engineers |
Pages | 51-59 |
Number of pages | 9 |
Volume | 1994 |
ISBN (Print) | 0819412430 |
Publication status | Published - 1994 |
Externally published | Yes |
Event | Advanced Optical Manufacturing and Testing IV - San Diego, CA, USA Duration: 1993 Jul 15 → 1993 Jul 16 |
Other
Other | Advanced Optical Manufacturing and Testing IV |
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City | San Diego, CA, USA |
Period | 93/7/15 → 93/7/16 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Ultraprecision diamond turning of optical crystals. / Yu, Junyi; Yan, Jiwang; Ma, Wensheng; Han, Rong jiu.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Victor J. Doherty. Vol. 1994 Publ by Society of Photo-Optical Instrumentation Engineers, 1994. p. 51-59.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Ultraprecision diamond turning of optical crystals
AU - Yu, Junyi
AU - Yan, Jiwang
AU - Ma, Wensheng
AU - Han, Rong jiu
PY - 1994
Y1 - 1994
N2 - A single point diamond turning technique for optical crystals is reported in this paper. The main factors influencing the machined surface quality are discovered and the regularities of the machining process are drawn. A new parameter Rs is introduced to evaluate the surface quality of diamond turned optical crystals. Under the optimized machining conditions, mirror surface of roughness value Ra 0.006 μm is obtained on single crystal germanium.
AB - A single point diamond turning technique for optical crystals is reported in this paper. The main factors influencing the machined surface quality are discovered and the regularities of the machining process are drawn. A new parameter Rs is introduced to evaluate the surface quality of diamond turned optical crystals. Under the optimized machining conditions, mirror surface of roughness value Ra 0.006 μm is obtained on single crystal germanium.
UR - http://www.scopus.com/inward/record.url?scp=0028749038&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028749038&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0028749038
SN - 0819412430
VL - 1994
SP - 51
EP - 59
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Doherty, Victor J.
PB - Publ by Society of Photo-Optical Instrumentation Engineers
ER -