Ultraprecision Machining of Silicon Wafer by Micromilling Process

A. Golshan, B. T.H.T. Baharudin, H. Aoyama, M. K.A.M. Ariffin, M. I.S. Ismail, A. A. Ehsan

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)

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Engineering & Materials Science