Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays

Mao Mukaida, Jiwang Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
PublisherAsian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE)
Publication statusPublished - 2017
EventASPEN/ASPE 2017 Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications - Hong Kong, Hong Kong
Duration: 2017 Mar 142017 Mar 17

Other

OtherASPEN/ASPE 2017 Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
CountryHong Kong
CityHong Kong
Period17/3/1417/3/17

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this

Mukaida, M., & Yan, J. (2017). Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays. In ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE).