Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays

Mao Mukaida, Jiwang Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
PublisherAsian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE)
Publication statusPublished - 2017
EventASPEN/ASPE 2017 Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications - Hong Kong, Hong Kong
Duration: 2017 Mar 142017 Mar 17

Other

OtherASPEN/ASPE 2017 Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
CountryHong Kong
CityHong Kong
Period17/3/1417/3/17

Fingerprint

Silicon
Machining
Single crystals
Infrared radiation

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this

Mukaida, M., & Yan, J. (2017). Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays. In ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE).

Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays. / Mukaida, Mao; Yan, Jiwang.

ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications. Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE), 2017.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mukaida, M & Yan, J 2017, Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays. in ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications. Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE), ASPEN/ASPE 2017 Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, Hong Kong, 17/3/14.
Mukaida M, Yan J. Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays. In ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications. Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE). 2017
Mukaida, Mao ; Yan, Jiwang. / Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays. ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications. Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE), 2017.
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