Ultrasonic vibration and cavitation-aided micromachining of hard and brittle materials

Ranko Tsuboi, Yasuhiro Kakinuma, Tojiro Aoyama, Hitoshi Ogawa, Seiji Hamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

This paper deals with the use of two types of ultrasonic-assisted micromachining methods for obtaining longer tool life and higher machining efficiency in the micromachining of hard and brittle materials. USV drilling is drilling that is aided by ultrasonic vibration in the direction axial to the tool. Cavitation machining is a method is aided by ultrasonic vibration of the cutting fluid. We investigated the effects of USV, cavitation, and their combination on the micro drilling of SiC. Experimental results clearly showed an improvement in tool life and a reduction in tool wear. Furthermore, the accuracy was improved.

Original languageEnglish
Title of host publicationProcedia CIRP
Pages342-346
Number of pages5
Volume1
Edition1
DOIs
Publication statusPublished - 2012
Event5th CIRP Conference on High Performance Cutting 2012, HPC 2012 - Zurich, Switzerland
Duration: 2012 Jun 42012 Jun 7

Other

Other5th CIRP Conference on High Performance Cutting 2012, HPC 2012
CountrySwitzerland
CityZurich
Period12/6/412/6/7

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Keywords

  • Cavitation
  • Ceramic
  • Drilling
  • Micromachining
  • Ultrasonic

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Control and Systems Engineering

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