Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers

Tsuneo Nakata, Fumihiko Kannari, Minoru Obara

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.

Original languageEnglish
Pages (from-to)179-190
Number of pages12
JournalOptoelectronics Tokyo
Volume8
Issue number2
Publication statusPublished - 1993 Jun

Fingerprint

Ultraviolet lasers
Organic polymers
Laser ablation
Vacuum
Laser beam effects
Polytetrafluoroethylenes
Polyimides
Polyethylene terephthalates
Microstructure
Electric Conductivity

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers. / Nakata, Tsuneo; Kannari, Fumihiko; Obara, Minoru.

In: Optoelectronics Tokyo, Vol. 8, No. 2, 06.1993, p. 179-190.

Research output: Contribution to journalArticle

Nakata, Tsuneo ; Kannari, Fumihiko ; Obara, Minoru. / Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers. In: Optoelectronics Tokyo. 1993 ; Vol. 8, No. 2. pp. 179-190.
@article{34e17f9148074614b6f94cfd3596004a,
title = "Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers",
abstract = "We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.",
author = "Tsuneo Nakata and Fumihiko Kannari and Minoru Obara",
year = "1993",
month = "6",
language = "English",
volume = "8",
pages = "179--190",
journal = "Optoelectronics - Devices and Technologies",
issn = "0912-5434",
publisher = "Mita Press",
number = "2",

}

TY - JOUR

T1 - Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers

AU - Nakata, Tsuneo

AU - Kannari, Fumihiko

AU - Obara, Minoru

PY - 1993/6

Y1 - 1993/6

N2 - We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.

AB - We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.

UR - http://www.scopus.com/inward/record.url?scp=0027609173&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027609173&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0027609173

VL - 8

SP - 179

EP - 190

JO - Optoelectronics - Devices and Technologies

JF - Optoelectronics - Devices and Technologies

SN - 0912-5434

IS - 2

ER -