Abstract
We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.
| Original language | English |
|---|---|
| Pages (from-to) | 179-190 |
| Number of pages | 12 |
| Journal | Optoelectronics Tokyo |
| Volume | 8 |
| Issue number | 2 |
| Publication status | Published - 1993 Jun 1 |
ASJC Scopus subject areas
- Engineering(all)