Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers

Tsuneo Nakata, Fumihiko Kannari, Minoru Obara

    Research output: Contribution to journalArticle

    7 Citations (Scopus)

    Abstract

    We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.

    Original languageEnglish
    Pages (from-to)179-190
    Number of pages12
    JournalOptoelectronics Tokyo
    Volume8
    Issue number2
    Publication statusPublished - 1993 Jun 1

    ASJC Scopus subject areas

    • Engineering(all)

    Fingerprint Dive into the research topics of 'Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers'. Together they form a unique fingerprint.

  • Cite this