Understanding of short-channel mobility in Tri-Gate nanowire MOSFETs and enhanced stress memorization technique for performance improvement

Physics & Astronomy

• nanowires 64%
• field effect transistors 63%
• transistors 42%
• performance 35%
• SOI (semiconductors) 29%
• ions 25%
• degradation 20%
• augmentation 16%

Chemical Compounds

• Nanowire 69%
• Compound Mobility 61%
• Strain 56%
• Ion 21%
• Reduction 12%

Engineering & Materials Science

• Nanowires 100%
• Ions 49%
• Transistors 45%
• Degradation 18%