Unified simulation of Schottky and Ohmic contacts

Kazuya Matsuzawa, Ken Uchida, Akira Nishiyama

Research output: Contribution to journalArticle

71 Citations (Scopus)

Abstract

The Schottky contact is an important consideration in the development of semiconductor devices. This paper shows that a practical Schottky contact model is available for a unified device simulation of Schottky and ohmic contacts. The present model includes the thermionic emission at the metal/semiconductor interface and the spatially distributed tunneling calculated at each grid of semiconductor around the interface. Simulation results of rectifying characteristics of Schottky barrier diodes (SBD's) and contact resistances under high impurity concentration conditions are reasonable, compared with measurements. As examples of application to actual devices, the influence of the contact resistance on salicided MOSFET's with source/drain extension and the immunity of Schottky barrier tunnel transistors (SBTT's) from the short-channel effect (SCE) are demonstrated.

Original languageEnglish
Pages (from-to)103-108
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume47
Issue number1
DOIs
Publication statusPublished - 2000 Jan
Externally publishedYes

Fingerprint

Ohmic contacts
Contact resistance
electric contacts
Semiconductor materials
contact resistance
Thermionic emission
Schottky barrier diodes
Electron tunneling
Semiconductor devices
Tunnels
Transistors
simulation
Metals
thermionic emission
immunity
Impurities
Schottky diodes
semiconductor devices
tunnels
transistors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Unified simulation of Schottky and Ohmic contacts. / Matsuzawa, Kazuya; Uchida, Ken; Nishiyama, Akira.

In: IEEE Transactions on Electron Devices, Vol. 47, No. 1, 01.2000, p. 103-108.

Research output: Contribution to journalArticle

Matsuzawa, K, Uchida, K & Nishiyama, A 2000, 'Unified simulation of Schottky and Ohmic contacts', IEEE Transactions on Electron Devices, vol. 47, no. 1, pp. 103-108. https://doi.org/10.1109/16.817574
Matsuzawa, Kazuya ; Uchida, Ken ; Nishiyama, Akira. / Unified simulation of Schottky and Ohmic contacts. In: IEEE Transactions on Electron Devices. 2000 ; Vol. 47, No. 1. pp. 103-108.
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