Uniform near-field nanopatterning due to the field distribution control by oblique femtosecond laser irradiation to silicon and gold nanoparticles

Tomoya Miyanishi, Mitsuhiro Terakawa, Minoru Obara

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We present near-field optical properties around silicon and gold nanoparticles aligned on a silicon substrate excited by oblique incidence femtosecond laser for nanohole processing. Near-field nanofabrication will open up smart applications for new optical devices with high-throughput processing. The near field around silicon and gold particles is explained by Mie scattering theory, while the near field around gold nanoparticles is explained by plasmon polaritons inside nanoparticles. With gold nanoparticles, theoretical study revealed that the incident laser energy is concentrated into the contact point between the particle and the substrate due to the image charge inside the substrate at any incident angles. With particles with a dielectric constant as high as silicon, the polarized charge shows a similar effect to the plasmon charge. Therefore the distribution of the concentrated energy provided with silicon nanoparticles is similar to that of gold nanoparticle.

    Original languageEnglish
    Title of host publicationProceedings of 2011 1st International Symposium on Access Spaces, ISAS 2011
    Pages197-201
    Number of pages5
    DOIs
    Publication statusPublished - 2011 Aug 23
    Event2011 1st International Symposium on Access Spaces, ISAS 2011 - Yokohama, Japan
    Duration: 2011 Jun 172011 Jun 19

    Publication series

    NameProceedings of 2011 1st International Symposium on Access Spaces, ISAS 2011

    Other

    Other2011 1st International Symposium on Access Spaces, ISAS 2011
    CountryJapan
    CityYokohama
    Period11/6/1711/6/19

    Keywords

    • femtosecond laser ablation
    • nanoparticles
    • near-field nanofabrication
    • plasmonics

    ASJC Scopus subject areas

    • Computer Networks and Communications
    • Electrical and Electronic Engineering

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  • Cite this

    Miyanishi, T., Terakawa, M., & Obara, M. (2011). Uniform near-field nanopatterning due to the field distribution control by oblique femtosecond laser irradiation to silicon and gold nanoparticles. In Proceedings of 2011 1st International Symposium on Access Spaces, ISAS 2011 (pp. 197-201). [5960947] (Proceedings of 2011 1st International Symposium on Access Spaces, ISAS 2011). https://doi.org/10.1109/ISAS.2011.5960947