Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip

Jim Taniguchi, Iwao Miyamoto, Naoto Ohno, Satoshi Honda

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Electron beam assisted chemical etching (EBACE) with oxygen gas is not applicable for direct fine patterning of diamond devices, because the diamond is an electrical insulator and electron beam impingement of the diamond causes the surface charge-up. It is possible to form conductive layer of hydrocarbon on the diamond surface by electron beam irradiation in the atmosphere of diffusion pump oil vapors. In this paper, a scanning electron microscope (SEM) combined with oxygen gas introduction system was used for EBACE of the diamond. It was found by in-situ SEM observation that rectangular patterns with several μm2 area and sub-μm depth were formed on the diamond chip.

Original languageEnglish
Pages (from-to)507-509
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume121
Issue number1-4
Publication statusPublished - 1997 Jan
Externally publishedYes

Fingerprint

Diamond
Surface charge
Hydrocarbons
Electron beams
Etching
Diamonds
contamination
Contamination
hydrocarbons
diamonds
chips
etching
electron beams
Electron microscopes
electron microscopes
Gases
diffusion pumps
Oxygen
Scanning
scanning

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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T1 - Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip

AU - Taniguchi, Jim

AU - Miyamoto, Iwao

AU - Ohno, Naoto

AU - Honda, Satoshi

PY - 1997/1

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AB - Electron beam assisted chemical etching (EBACE) with oxygen gas is not applicable for direct fine patterning of diamond devices, because the diamond is an electrical insulator and electron beam impingement of the diamond causes the surface charge-up. It is possible to form conductive layer of hydrocarbon on the diamond surface by electron beam irradiation in the atmosphere of diffusion pump oil vapors. In this paper, a scanning electron microscope (SEM) combined with oxygen gas introduction system was used for EBACE of the diamond. It was found by in-situ SEM observation that rectangular patterns with several μm2 area and sub-μm depth were formed on the diamond chip.

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