UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass

Ryotaro Mori, Yoshinori Matsumoto

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Emulsion gray-scale masks were fabricated using three types of ink-jet printers and a 1/20 projector. Scanner was used to measure the light transparency of the printed transparency sheets and emulsion gray-scale mask. Power of UV light was measured with UV power meter especially for the wavelength of 313[nm] in which photosensitive glass absorbs well. The UV light transparency of emulsion gray-scale mask was measured with UV power meter, and the effect for the etching depth of photo sensitive glass was discussed in this paper. Then, photosensitive glass was processed by the mask and deep UV light source, and the relationship between etching depth and gray-scale value was measured. From the result, characteristics emulsion gray-scale mask of were unveiled for 3-D micro machining of photosensitive glass.

Original languageEnglish
Pages (from-to)499-503
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume123
Issue number11
DOIs
Publication statusPublished - 2003

Keywords

  • 3-D micro machining
  • deep UV
  • gray-scale mask
  • photo lithography
  • photo sensitive glass

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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