Variable forgetting factor-based friction compensation method of precision stages

Shigeki Goka; Seiji Hashimoto; Kiyoshi Ohishi; Takeo Ishikawa; Shuichi Adachi; Koji Kosaka; Hiroshi Kubota; Tadahiro Ohmi

doi:10.1109/SICE.2006.315007

Variable forgetting factor-based friction compensation method of precision stages

Shigeki Goka, Seiji Hashimoto, Kiyoshi Ohishi, Takeo Ishikawa, Shuichi Adachi, Koji Kosaka, Hiroshi Kubota, Tadahiro Ohmi

Department of Applied Physics and Physico-Informatics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.

Original language	English
Title of host publication	2006 SICE-ICASE International Joint Conference
Publisher	Institute of Control Automation and Systems Engineers (ICASE)
Pages	3995-4000
Number of pages	6
ISBN (Print)	8995003855, 9788995003855
DOIs	https://doi.org/10.1109/SICE.2006.315007
Publication status	Published - 2006
Event	2006 SICE-ICASE International Joint Conference - Busan, Korea, Republic of Duration: 2006 Oct 18 → 2006 Oct 21

Publication series

Name	2006 SICE-ICASE International Joint Conference

Other

Other	2006 SICE-ICASE International Joint Conference
Country/Territory	Korea, Republic of
City	Busan
Period	06/10/18 → 06/10/21

Keywords

Adaptive identification
Friction compensation
Ultra-precision stage
Variable forgetting factor

ASJC Scopus subject areas

Computer Science Applications
Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SICE.2006.315007

Cite this

Goka, S., Hashimoto, S., Ohishi, K., Ishikawa, T., Adachi, S., Kosaka, K., Kubota, H., & Ohmi, T. (2006). Variable forgetting factor-based friction compensation method of precision stages. In 2006 SICE-ICASE International Joint Conference (pp. 3995-4000). [4108206] (2006 SICE-ICASE International Joint Conference). Institute of Control Automation and Systems Engineers (ICASE). https://doi.org/10.1109/SICE.2006.315007

Variable forgetting factor-based friction compensation method of precision stages. / Goka, Shigeki; Hashimoto, Seiji; Ohishi, Kiyoshi et al.
2006 SICE-ICASE International Joint Conference. Institute of Control Automation and Systems Engineers (ICASE), 2006. p. 3995-4000 4108206 (2006 SICE-ICASE International Joint Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Goka, S, Hashimoto, S, Ohishi, K, Ishikawa, T, Adachi, S, Kosaka, K, Kubota, H & Ohmi, T 2006, Variable forgetting factor-based friction compensation method of precision stages. in 2006 SICE-ICASE International Joint Conference., 4108206, 2006 SICE-ICASE International Joint Conference, Institute of Control Automation and Systems Engineers (ICASE), pp. 3995-4000, 2006 SICE-ICASE International Joint Conference, Busan, Korea, Republic of, 06/10/18. https://doi.org/10.1109/SICE.2006.315007

Goka S, Hashimoto S, Ohishi K, Ishikawa T, Adachi S, Kosaka K et al. Variable forgetting factor-based friction compensation method of precision stages. In 2006 SICE-ICASE International Joint Conference. Institute of Control Automation and Systems Engineers (ICASE). 2006. p. 3995-4000. 4108206. (2006 SICE-ICASE International Joint Conference). doi: 10.1109/SICE.2006.315007

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abstract = "This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.",

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AU - Goka, Shigeki

AU - Hashimoto, Seiji

AU - Ohishi, Kiyoshi

AU - Ishikawa, Takeo

AU - Adachi, Shuichi

AU - Kosaka, Koji

AU - Kubota, Hiroshi

AU - Ohmi, Tadahiro

PY - 2006

Y1 - 2006

N2 - This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.

AB - This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.

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KW - Friction compensation

KW - Ultra-precision stage

KW - Variable forgetting factor

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Variable forgetting factor-based friction compensation method of precision stages

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Keywords

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