Variable forgetting factor-based friction compensation method of precision stages

Shigeki Goka, Seiji Hashimoto, Kiyoshi Ohishi, Takeo Ishikawa, Shuichi Adachi, Koji Kosaka, Hiroshi Kubota, Tadahiro Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.

Original languageEnglish
Title of host publication2006 SICE-ICASE International Joint Conference
Pages2995-4000
Number of pages1006
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 SICE-ICASE International Joint Conference - Busan, Korea, Republic of
Duration: 2006 Oct 182006 Oct 21

Publication series

Name2006 SICE-ICASE International Joint Conference

Other

Other2006 SICE-ICASE International Joint Conference
CountryKorea, Republic of
CityBusan
Period06/10/1806/10/21

Keywords

  • Adaptive identification
  • Friction compensation
  • Ultra-precision stage
  • Variable forgetting factor

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Goka, S., Hashimoto, S., Ohishi, K., Ishikawa, T., Adachi, S., Kosaka, K., Kubota, H., & Ohmi, T. (2006). Variable forgetting factor-based friction compensation method of precision stages. In 2006 SICE-ICASE International Joint Conference (pp. 2995-4000). [4108206] (2006 SICE-ICASE International Joint Conference). https://doi.org/10.1109/SICE.2006.315007