TY - JOUR
T1 - Vertical and longitudinal multilayer graphene growth using novel heat-beam-assisted chemical vapor deposition
AU - Ito, Kazuyuki
AU - Sawabe, Ryosuke
AU - Awano, Yuji
PY - 2013/11/1
Y1 - 2013/11/1
N2 - A vertical and longitudinal multilayer graphene sheet was grown on a substrate by catalytic chemical vapor deposition (CVD). For the CVD, we used a novel annealing method called "heat beam (HB)", in which high-temperature inert gas is blown directly onto the chip surface in an inertgas- flow chamber, and a safe and chemically stable " diethylacetylene" as a hydrocarbon source. The advantages of HB-CVD include not only a steep temperature-depth profile but also better scalability for mass production, such as with roll-to-roll systems. We investigate the crystalline quality and structure of HB-CVD-grown graphene by Raman spectroscopy and transmission electron microscopy.
AB - A vertical and longitudinal multilayer graphene sheet was grown on a substrate by catalytic chemical vapor deposition (CVD). For the CVD, we used a novel annealing method called "heat beam (HB)", in which high-temperature inert gas is blown directly onto the chip surface in an inertgas- flow chamber, and a safe and chemically stable " diethylacetylene" as a hydrocarbon source. The advantages of HB-CVD include not only a steep temperature-depth profile but also better scalability for mass production, such as with roll-to-roll systems. We investigate the crystalline quality and structure of HB-CVD-grown graphene by Raman spectroscopy and transmission electron microscopy.
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U2 - 10.7567/APEX.6.115101
DO - 10.7567/APEX.6.115101
M3 - Article
AN - SCOPUS:84887815164
SN - 1882-0778
VL - 6
JO - Applied Physics Express
JF - Applied Physics Express
IS - 11
M1 - 115101
ER -