Vertical and longitudinal multilayer graphene growth using novel heat-beam-assisted chemical vapor deposition

Kazuyuki Ito, Ryosuke Sawabe, Yuji Awano

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A vertical and longitudinal multilayer graphene sheet was grown on a substrate by catalytic chemical vapor deposition (CVD). For the CVD, we used a novel annealing method called "heat beam (HB)", in which high-temperature inert gas is blown directly onto the chip surface in an inertgas- flow chamber, and a safe and chemically stable " diethylacetylene" as a hydrocarbon source. The advantages of HB-CVD include not only a steep temperature-depth profile but also better scalability for mass production, such as with roll-to-roll systems. We investigate the crystalline quality and structure of HB-CVD-grown graphene by Raman spectroscopy and transmission electron microscopy.

Original languageEnglish
Article number115101
JournalApplied Physics Express
Volume6
Issue number11
DOIs
Publication statusPublished - 2013 Nov

Fingerprint

Graphene
Chemical vapor deposition
graphene
Multilayers
vapor deposition
heat
flow chambers
high temperature gases
Inert gases
Raman spectroscopy
Scalability
rare gases
hydrocarbons
Hydrocarbons
chips
Annealing
Crystalline materials
Transmission electron microscopy
Temperature
transmission electron microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Vertical and longitudinal multilayer graphene growth using novel heat-beam-assisted chemical vapor deposition. / Ito, Kazuyuki; Sawabe, Ryosuke; Awano, Yuji.

In: Applied Physics Express, Vol. 6, No. 11, 115101, 11.2013.

Research output: Contribution to journalArticle

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