Vertical and longitudinal multilayer graphene growth using novel heat-beam-assisted chemical vapor deposition

Kazuyuki Ito, Ryosuke Sawabe, Yuji Awano

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Abstract

A vertical and longitudinal multilayer graphene sheet was grown on a substrate by catalytic chemical vapor deposition (CVD). For the CVD, we used a novel annealing method called "heat beam (HB)", in which high-temperature inert gas is blown directly onto the chip surface in an inertgas- flow chamber, and a safe and chemically stable " diethylacetylene" as a hydrocarbon source. The advantages of HB-CVD include not only a steep temperature-depth profile but also better scalability for mass production, such as with roll-to-roll systems. We investigate the crystalline quality and structure of HB-CVD-grown graphene by Raman spectroscopy and transmission electron microscopy.

Original languageEnglish
Article number115101
JournalApplied Physics Express
Volume6
Issue number11
DOIs
Publication statusPublished - 2013 Nov 1

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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