Visualization of acoustic waves and cavitation in ultrasonic water flow

Hidehisa Usui, Tomoatsu Ishibashi, Hisanori Matsuo, Katsuhide Watanabe, Keita Ando

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Visualization experiments were performed to examine whether acoustic bubbles play a role in ultrasonic water flow cleaning, as in convention cleaning with ultrasonic baths. Schlieren visualization confirmed the standing-wave-like acoustic field in ultrasonic water flow that collides with a glass surface. Backlight visualization showed that cavitation bubbles appear in the water flow spreading over the glass surface. These bubbles are found to oscillate in volume and move inside film flow and thus expected to play a role as active cleaning agents.

Original languageEnglish
Title of host publicationUltra Clean Processing of Semiconductor Surfaces XV - Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
EditorsPaul W. Mertens, Kurt Wostyn, Marc Meuris, Marc Heyns
PublisherTrans Tech Publications Ltd
Pages186-191
Number of pages6
ISBN (Print)9783035738018
DOIs
Publication statusPublished - 2021
Event15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021 - Mechelen, Belgium
Duration: 2021 Apr 122021 Apr 15

Publication series

NameSolid State Phenomena
Volume314 SSP
ISSN (Print)1012-0394
ISSN (Electronic)1662-9779

Conference

Conference15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
CountryBelgium
CityMechelen
Period21/4/1221/4/15

Keywords

  • Acoustic cavitation
  • Bubble motion
  • Ultrasonic water flow cleaning

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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