Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array

Hidetoshi Takahashi; Isao Shimoyama

doi:10.1109/MEMSYS.2018.8346522

Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array

Hidetoshi Takahashi, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

This paper reports a Pitot tube type airflow sensor, which achieves both high sensitivity and water resistance. The proposed Pitot tube is composed of piezoresistive cantilevers as differential pressure sensing elements and nano-hole arrays as waterproof elements. The nano-hole arrays are attached to the air inlets, which are located the tip of the tube and sides of the sphere. When airflow is applied to the Pitot tube, air passes through the nano-hole arrays, and differential pressure between two inlets acts on the piezoresistive cantilevers. On the other hand, when locating in water, the nano-hole arrays protect the water penetration into the tube. The Pitot tube will be used for the airspeed measurement of flying marine birds.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	214-217
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346522
Publication status	Published - 2018 Apr 24
Externally published	Yes
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 2018 Jan 21 → 2018 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Other

Other	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	18/1/21 → 18/1/25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2018.8346522

Cite this

Takahashi, H., & Shimoyama, I. (2018). Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 214-217). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346522

Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array. / Takahashi, Hidetoshi; Shimoyama, Isao.

2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 214-217 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takahashi, H & Shimoyama, I 2018, Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 214-217, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 18/1/21. https://doi.org/10.1109/MEMSYS.2018.8346522

Takahashi H, Shimoyama I. Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 214-217. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346522

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Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array

Abstract

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ASJC Scopus subject areas

UN SDGs

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