Lee, G.,
Takahashi, H., Kan, T., Kim, J., Donmez, N., Park, J., Kim, D., Ka, S., Nam, M., Lim, D. & Heo, Y. J.,
2020 1,
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc.,
p. 323-324 2 p. 9056299. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2020-January).
研究成果: Conference contribution