年別の研究成果
年別の研究成果
検索結果
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2015
3D structural foramation utilizing glass transition of a Parylene film
Kan, T., Isozaki, A., Takahashi, H., Matsumoto, K. & Shimoyama, I., 2015 2月 26, In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2015-February, February, p. 405-408 4 p., 7050975.研究成果: Conference article › 査読
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Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics
Watanabe, R., Minh-Dung, N., Takahashi, H., Takahata, T., Matsumoto, K. & Shimoyama, I., 2015 2月 26, In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2015-February, February, p. 212-214 3 p., 7050924.研究成果: Conference article › 査読
4 被引用数 (Scopus) -
2013
An AlN cantilever for a wake-up switch triggered by air pressure change
Kaiho, Y., Takahashi, H., Tomimatsu, Y., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T. & Maeda, R., 2013, In: Journal of Physics: Conference Series. 476, 1, 012122.研究成果: Conference article › 査読
Open Access5 被引用数 (Scopus) -
2009
Air pressure sensor for an insect wing
Takahashi, H., Matsumoto, K. & Shimoyama, I., 2009 6月 1, In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 825-828 4 p., 4805510.研究成果: Conference article › 査読
12 被引用数 (Scopus)