Ota, T., Nakayama, M., Kanno, Y.,
Suzuki, T. &
Miki, N.,
2018 4 24,
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc.,
p. 412-414 3 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2018-January).
研究成果: Conference contribution