年別の研究成果
年別の研究成果
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Capacitive accelerometer using SBD-SOI structure
Matsumoto, Y., Iwakiri, M., Tanaka, H., Ishida, M. & Nakamura, T., 1995 12月 1, p. 550-553. 4 p.研究成果: Paper › 査読
3 被引用数 (Scopus) -
Compensation method of offset and its temperature drift in silicon piezoresistive pressure sensor using double wheatstone-bridge configuration
Lee, Y. T., Seo, H. D., Kawamura, A., Yamada, T., Matsumoto, Y., Ishida, M. & Nakamura, T., 1995, p. 570-573. 4 p.研究成果: Paper › 査読
16 被引用数 (Scopus) -
Fluorocarbon film for protection from alkaline etchant and elimination of in-use stiction
Matsumoto, Y., Yoshida, K. & Ishida, M., 1997 1月 1, p. 695-698. 4 p.研究成果: Paper › 査読
12 被引用数 (Scopus) -
Miniature integrated capacitive pressure sensor
Matsumoto, Y., Shoji, S. & Esashi, M., 1990 12月 1, p. 701-704. 4 p.研究成果: Paper › 査読
7 被引用数 (Scopus) -
Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers
Takao, H., Matsumoto, Y. & Ishida, M., 1997 1月 1, p. 1173-1176. 4 p.研究成果: Paper › 査読
12 被引用数 (Scopus) -
The monolithic heterogeneous integration of GaAs PIN photodiode and Si CMOS-based transimpedance amplifier
Kume, E., Ishii, H., Itatani, T., Yamanaka, S., Takada, T., Hata, M., Osada, T., Inoue, T. & Matsumoto, Y., 2014.研究成果: Paper › 査読
1 被引用数 (Scopus) -
Three dimensional vector accelerometer using SOI structure for high temperature
Takao, H., Matsumoto, Y., Seo, H. D. & Tanaka, H., 1995 12月 1, p. 683-686. 4 p.研究成果: Paper › 査読
12 被引用数 (Scopus)