1=f noise characteristics of fin-type field-effect transistors in saturation region

In this work, we measured 1=f noise of independent-double-gate-(IDG-) fin-type FET (FinFET) which has two independent gates. Flicker noise of common-double-gate-(CDG-) mode which both gates are applied with the same voltage and IDG-mode that has one gate voltage grounded and the other gate voltage applied with arbitrary voltage, and both result were compared with the same drain current (Id). First, we measured relationship between characteristic of the normalized 1=f noise by Id (SId =I2 d ) and characteristic of Id. Both the SId =I2 d of IDG-and CDG-modes show nearly equal values and tendency. Next, this work also shows the relationship between 1=f noise and vertical electric field (Ei) of surface of gate oxide film. As a result we could not definitely see a large margin of 1=f noise between CDG-and IDG-modes from Ei. This work also discovered that 1=f noise was greatly influenced by Id density.