3D airflow velocity vector sensor

N. Minh-Dung, H. Takahashi, K. Kuwana, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

7 被引用数 (Scopus)

抄録

In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.

本文言語English
ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
ページ513-516
ページ数4
DOI
出版ステータスPublished - 2011 4 13
外部発表はい
イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
継続期間: 2011 1 232011 1 27

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
国/地域Mexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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