3D airflow velocity vector sensor

N. Minh-Dung, Hidetoshi Takahashi, K. Kuwana, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

5 引用 (Scopus)

抄録

In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.

元の言語English
ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
ページ513-516
ページ数4
DOI
出版物ステータスPublished - 2011 4 13
外部発表Yes
イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
継続期間: 2011 1 232011 1 27

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷物)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Mexico
Cancun
期間11/1/2311/1/27

Fingerprint

sensors
Sensors
wind tunnels
Wind tunnels
Experiments
Direction compound

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

Minh-Dung, N., Takahashi, H., Kuwana, K., Takahata, T., Matsumoto, K., & Shimoyama, I. (2011). 3D airflow velocity vector sensor. : 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 513-516). [5734474] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734474

3D airflow velocity vector sensor. / Minh-Dung, N.; Takahashi, Hidetoshi; Kuwana, K.; Takahata, T.; Matsumoto, K.; Shimoyama, I.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 513-516 5734474 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Minh-Dung, N, Takahashi, H, Kuwana, K, Takahata, T, Matsumoto, K & Shimoyama, I 2011, 3D airflow velocity vector sensor. : 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734474, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 513-516, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734474
Minh-Dung N, Takahashi H, Kuwana K, Takahata T, Matsumoto K, Shimoyama I. 3D airflow velocity vector sensor. : 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 513-516. 5734474. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734474
Minh-Dung, N. ; Takahashi, Hidetoshi ; Kuwana, K. ; Takahata, T. ; Matsumoto, K. ; Shimoyama, I. / 3D airflow velocity vector sensor. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. pp. 513-516 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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