TY - GEN
T1 - 3D airflow velocity vector sensor
AU - Minh-Dung, N.
AU - Takahashi, H.
AU - Kuwana, K.
AU - Takahata, T.
AU - Matsumoto, K.
AU - Shimoyama, I.
PY - 2011/4/13
Y1 - 2011/4/13
N2 - In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.
AB - In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.
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U2 - 10.1109/MEMSYS.2011.5734474
DO - 10.1109/MEMSYS.2011.5734474
M3 - Conference contribution
AN - SCOPUS:79953796153
SN - 9781424496327
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 513
EP - 516
BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Y2 - 23 January 2011 through 27 January 2011
ER -