3D structural foramation utilizing glass transition of a Parylene film

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference article

抄録

This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.

元の言語English
記事番号7050975
ページ(範囲)405-408
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2015-February
発行部数February
DOI
出版物ステータスPublished - 2015 2 26
外部発表Yes
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1 182015 1 22

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actuation
Glass transition
Thin films
microstructure
Microstructure
glass
thin films
Thick films
glass transition temperature
ambient temperature
thick films
Cooling
cooling
Fabrication
Silicon
fabrication
silicon
Experiments
Temperature
parylene

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

3D structural foramation utilizing glass transition of a Parylene film. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao.

:: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 巻 2015-February, 番号 February, 7050975, 26.02.2015, p. 405-408.

研究成果: Conference article

Kan, Tetsuo ; Isozaki, Akihiro ; Takahashi, Hidetoshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / 3D structural foramation utilizing glass transition of a Parylene film. :: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2015 ; 巻 2015-February, 番号 February. pp. 405-408.
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