抄録
This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.
| 元の言語 | English |
|---|---|
| 記事番号 | 7050975 |
| ページ（範囲） | 405-408 |
| ページ数 | 4 |
| ジャーナル | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| 巻 | 2015-February |
| 発行部数 | February |
| DOI | |
| 出版物ステータス | Published - 2015 2 26 |
| 外部発表 | Yes |
| イベント | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal 継続期間: 2015 1 18 → 2015 1 22 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
これを引用
3D structural foramation utilizing glass transition of a Parylene film. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao.
：: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 巻 2015-February, 番号 February, 7050975, 26.02.2015, p. 405-408.研究成果: Conference article
}
TY - JOUR
T1 - 3D structural foramation utilizing glass transition of a Parylene film
AU - Kan, Tetsuo
AU - Isozaki, Akihiro
AU - Takahashi, Hidetoshi
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2015/2/26
Y1 - 2015/2/26
N2 - This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.
AB - This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.
UR - http://www.scopus.com/inward/record.url?scp=84931046712&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84931046712&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2015.7050975
DO - 10.1109/MEMSYS.2015.7050975
M3 - Conference article
AN - SCOPUS:84931046712
VL - 2015-February
SP - 405
EP - 408
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SN - 1084-6999
IS - February
M1 - 7050975
ER -