3D structural foramation utilizing glass transition of a Parylene film

Tetsuo Kan; Akihiro Isozaki; Hidetoshi Takahashi; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2015.7050975

3D structural foramation utilizing glass transition of a Parylene film

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference article › 査読

抄録

This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature T_g of the Parylene, 80-100 °C, and then cooled down below T_g. In this process, the rearrangement of the Parylene film happens above T_g, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.

本文言語	English
論文番号	7050975
ページ（範囲）	405-408
ページ数	4
ジャーナル	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
巻	2015-February
号	February
DOI	https://doi.org/10.1109/MEMSYS.2015.7050975
出版ステータス	Published - 2015 2 26
外部発表	はい
イベント	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal 継続期間: 2015 1 18 → 2015 1 22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

文献へのアクセス

10.1109/MEMSYS.2015.7050975

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引用スタイル

3D structural foramation utilizing glass transition of a Parylene film. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7050975, 26.02.2015, p. 405-408.

研究成果: Conference article › 査読

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AU - Shimoyama, Isao

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