A barometric pressure sensor based on the air-gap scale effect in a cantilever

Nguyen Minh-Dung, Hidetoshi Takahashi, Takeshi Uchiyama, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article査読

15 被引用数 (Scopus)

抄録

The most common structure for a conventional barometric pressure sensor consists of a vacuum-sealed cavity and a diaphragm. However, we hypothesize that a simple structure with an unsealed cavity and an ultra-thin cantilever can provide more sensitive measurements. We produced a 300-nm-thick cantilever with a small spring constant, which made the cantilever sensitive to low pressures. We demonstrated that miniaturizing the air-gap of the cantilever enables the sensor to measure barometric pressure changes at a low pressure change rate with a high resolution, which was 1 Pa at 0.05 Hz, and for a gap size of 1.7 μm.

本文言語English
論文番号143505
ジャーナルApplied Physics Letters
103
14
DOI
出版ステータスPublished - 2013 9 30
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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