A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces

Kodai Nagayama, Jiwang Yan

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Slow tool servo (STS) is widely used to fabricate freeform optical elements. However, it is still difficult to obtain nanometer-level form accuracy in a short time due to characteristic error factors such as the tool trajectory error and the dynamic follow-up error of machine tools. In this study, we proposed a new machining flow, which included error factor modification and error prediction, to improve the form accuracy in machining freeform surfaces by STS. Comprehensive error analysis and modelling was performed to identify all the main error factors, some of which have never been taken into account by previous researchers. Numerical simulation was then carried out to clarify the relationship between these error factors and the form error of the finished surface. Using the proposed error correction/prediction system, fabrication of micron-level sinusoidal wave grids was attempted on single-crystal silicon. The form accuracy was successfully improved to the nanometer-level.

本文言語English
ホスト出版物のタイトルEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
編集者O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
出版社euspen
ページ51-52
ページ数2
ISBN(印刷版)9780995775121
出版ステータスPublished - 2018 1 1
イベント18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy
継続期間: 2018 6 42018 6 8

Other

Other18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
CountryItaly
CityVenice
Period18/6/418/6/8

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Environmental Engineering
  • Mechanical Engineering
  • Materials Science(all)

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