A correlation between particle growth and spatiotemporal RF plasma structure

Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF₂CF₂-)_n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.