A correlation between particle growth and spatiotemporal RF plasma structure

T. Kamata, S. Kakuta, Y. Yamaguchi, T. Makabe

研究成果: Article査読

7 被引用数 (Scopus)

抄録

Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF2CF2-)n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.

本文言語English
論文番号011
ページ(範囲)310-313
ページ数4
ジャーナルPlasma Sources Science and Technology
3
3
DOI
出版ステータスPublished - 1994 12 1

ASJC Scopus subject areas

  • Condensed Matter Physics

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