A correlation between particle growth and spatiotemporal RF plasma structure

T. Kamata; S. Kakuta; Y. Yamaguchi; T. Makabe

doi:10.1088/0963-0252/3/3/011

A correlation between particle growth and spatiotemporal RF plasma structure

T. Kamata, S. Kakuta, Y. Yamaguchi, T. Makabe

常任理事

研究成果: Article › 査読

7 被引用数 (Scopus)

抄録

Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF₂CF₂-)_n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.

本文言語	English
論文番号	011
ページ（範囲）	310-313
ページ数	4
ジャーナル	Plasma Sources Science and Technology
巻	3
号	3
DOI	https://doi.org/10.1088/0963-0252/3/3/011
出版ステータス	Published - 1994 12 1

ASJC Scopus subject areas

Condensed Matter Physics

文献へのアクセス

10.1088/0963-0252/3/3/011

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引用スタイル

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