抄録
Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF2CF2-)n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.
本文言語 | English |
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論文番号 | 011 |
ページ(範囲) | 310-313 |
ページ数 | 4 |
ジャーナル | Plasma Sources Science and Technology |
巻 | 3 |
号 | 3 |
DOI | |
出版ステータス | Published - 1994 12月 1 |
ASJC Scopus subject areas
- 凝縮系物理学