TY - GEN
T1 - A gas sensor based on viscosity change of ionic liquid
AU - Ohsawa, Kazuharu
AU - Takahashi, Hidetoshi
AU - Noda, Kentaro
AU - Kan, Tetsuo
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2011/4/13
Y1 - 2011/4/13
N2 - We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.
AB - We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.
UR - http://www.scopus.com/inward/record.url?scp=79953801466&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2011.5734477
DO - 10.1109/MEMSYS.2011.5734477
M3 - Conference contribution
AN - SCOPUS:79953801466
SN - 9781424496327
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 525
EP - 528
BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Y2 - 23 January 2011 through 27 January 2011
ER -