A Highly Sensitive Capacitive-type Strain Sensor Using Wrinkled Ultrathin Gold Films

Roda Nur, Naoji Matsuhisa, Zhi Jiang, Md Osman Goni Nayeem, Tomoyuki Yokota, Takao Someya

研究成果: Article査読

103 被引用数 (Scopus)

抄録

Soft strain sensors are needed for a variety of applications including human motion and health monitoring, soft robotics, and human/machine interactions. Capacitive-type strain sensors are excellent candidates for practical applications due to their great linearity and low hysteresis; however, a big limitation of this sensor is its inherent property of low sensitivity when it comes to detecting various levels of applied strain. This limitation is due to the structural properties of the parallel plate capacitor structure during applied stretching operations. According to this model, at best the maximum gauge factor (sensitivity) that can be achieved is 1. Here, we report the highest gauge factor ever achieved in capacitive-type strain sensors utilizing an ultrathin wrinkled gold film electrode. Our strain sensor achieved a gauge factor slightly above 3 and exhibited high linearity with negligible hysteresis over a maximum applied strain of 140%. We further demonstrated this highly sensitive strain sensor in a wearable application. This work opens up the possibility of engineering even higher sensitivity in capacitive-type strain sensors for practical and reliable wearable applications.

本文言語English
ページ(範囲)5610-5617
ページ数8
ジャーナルNano Letters
18
9
DOI
出版ステータスPublished - 2018 9 12
外部発表はい

ASJC Scopus subject areas

  • バイオエンジニアリング
  • 化学 (全般)
  • 材料科学(全般)
  • 凝縮系物理学
  • 機械工学

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