A model of amorphous silicon deposition in DC glow discharge in silane

Engineering & Materials Science

• Glow discharges 100%
• Amorphous silicon 92%
• Deposition rates 86%
• Silanes 86%
• Electrons 67%
• Cathodes 67%
• Molecules 65%
• Plasma sheaths 59%
• Boltzmann equation 51%
• Negative ions 45%
• Poisson equation 43%
• Spatial distribution 37%
• Plasmas 31%
• Ions 31%
• Fluxes 27%
• Electrodes 25%
• Gases 19%

Chemical Compounds

• Amorphous Silicon 91%
• Glow Discharge 80%
• Nonequilibrium 72%
• Silane 64%
• Boltzmann Equation 56%
• Cathode 49%
• Electron Particle 36%
• Molecule 23%
• Plasma 20%
• Diffusion 20%
• Gas 17%
• Behavior as Electrode 16%
• Ion 13%

Physics & Astronomy

• silanes 73%
• glow discharges 67%
• amorphous silicon 62%
• direct current 52%
• cathodes 27%
• continuity equation 19%
• molecules 18%
• Poisson equation 17%
• negative ions 17%
• sheaths 17%
• spatial distribution 14%
• electrons 14%
• electrodes 10%
• profiles 9%
• gases 8%
• ions 7%