A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers

Hidekuni Takao, Yoshinori Matsumoto, Makoto Ishida

研究成果: Article査読

36 被引用数 (Scopus)

抄録

In this paper, the development of a bulk-microniachined CMOS integrated three-axis accelerometer which includes analog signal conditioning circuits is presented. The accelerometer was designed to simplify the signal processing tasks by incorporating a set of circuits for three-axis signal conditioning. This approach resulted in a 25% reduction of the circuit area. Stress-sensitive differential amplifiers (SSDA's) have been used as signal transducers, because they can be conveniently formed in a small area. The sensitivity and resolution of the fabricated devices realized in 8 x 8 mm2 die area were 192 mV/g and 0.024 g for Z-axis acceleration, and 23 mV/g and 0.23 g for X and Y axis acceleration, respectively. The electrical noise component in the analog CMOS circuits was reduced by using a chopper stabilization technique. It was observed that there is a proper chopping clock frequency range to maximize the noise reduction effect. The noise of the SSDA was found to be related with the characteristics of CMOS differential amplifiers used. Typical temperature coefficient of sensitivity was about -2000 ppm/°C, which could be reduced to -320 ppm/ °C or less by selecting a proper bias condition.

本文言語English
ページ(範囲)109-116
ページ数8
ジャーナルIEEE Transactions on Electron Devices
46
1
DOI
出版ステータスPublished - 1999
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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