A novel sustaining mechanism in capacitively coupled radio frequency plasma in oxygen

Mari Shibata, Toshiaki Makabe, Nobuhiko Nakano

研究成果: Article査読

13 被引用数 (Scopus)

抄録

This study presents numerical evidence regarding a new type of self-sustaining mechanism for capacitively-coupled-radiofrequency plasma utilizing a self-consistent relaxation continuum model. The regime's existence depends on an electron source, produced by a detachment reaction from negative ions with high density in the bulk plasma, under a system that the spatiotemporal total rate of electron attachment is greater than that of ionization. That is, a novel mechanism differs markedly from previous ones that radiofrequency plasmas are mainly sustained by the ionization multiplication of low density electrons in a sheath/plasma boundary. The consequences of this finding are discussed from both charge balance and reaction sequence balance in the bulk plasma at 13.56 MHz in oxygen.

本文言語English
ページ(範囲)4182-4185
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
37
7
DOI
出版ステータスPublished - 1998 7月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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