A novel sustaining mechanism in capacitively coupled radio frequency plasma in oxygen

Physics & Astronomy

• sustaining 100%
• radio frequencies 71%
• oxygen 49%
• ionization 29%
• plasma sheaths 26%
• electron attachment 25%
• electron sources 24%
• detachment 22%
• negative ions 21%
• multiplication 21%
• continuums 14%

Engineering & Materials Science

• Plasmas 76%
• Oxygen 66%
• Ionization 53%
• Electron sources 37%
• Plasma sheaths 36%
• Carrier concentration 29%
• Negative ions 27%
• Electrons 20%
• Relaxation 19%