A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator

K. Nakahara, K. Yoshimura, Y. Okayama, N. Miki

研究成果: Conference contribution

8 被引用数 (Scopus)

抄録

We demonstrate a peristaltic micropump that utilizes traveling waves of polymer membranes to transport liquids. This micropump does not require any valves and more importantly, the traveling waves can be generated by a single actuator. The micropump contains hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible glycerin in a micro chamber that has different cross-sectional area at the top and the bottom to amplify the amplitude of the traveling waves. The manufactured micropump achieved a flow rate of 1.3 ml/min, which was by far more efficient than a micropump without HDAM.

本文言語English
ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
ページ1083-1086
ページ数4
DOI
出版ステータスPublished - 2011 4 13
イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
継続期間: 2011 1 232011 1 27

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
国/地域Mexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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