A triaxial tactile sensor without crosstalk using pairs of piezoresistive beams with sidewall doping

Hidetoshi Takahashi, Akihito Nakai, Nguyen Thanh-Vinh, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article査読

73 被引用数 (Scopus)

抄録

This paper reports on a triaxial tactile sensor using piezoresistive beams. The sensor chip is composed of two pairs of sidewall-doped Si beams for shear stress sensing and one pair of surface-doped Si beams for normal stress sensing. The sizes of the shear- and pressure-sensing beams are 180 μm × 15 μm × 20 μm and 250 μm × 50 μm × 20 μm (length × width × thickness), respectively. The sensor chip is embedded in a PDMS sheet 10 mm × 10 mm × 2 mm in size. Because the simple beam structure can be fabricated easily, the proposed sensor is compatible with semiconductor device fabrication. The fabricated sensor was evaluated for normal and shear stress (0-400 kPa and 0-100 kPa, respectively). The responses of the corresponding beam pairs were found to be proportional to the magnitude of the applied stresses without the influence of the other stresses. The relationship between the angle of shear stress and the responses of each beam pair was also evaluated. Each beam pair detects only one axis's shear stress and showed little reaction to the other axes' shear stress. As a result, the proposed sensor can measure the three axial components of normal and shear stress independently.

本文言語English
ページ(範囲)43-48
ページ数6
ジャーナルSensors and Actuators, A: Physical
199
DOI
出版ステータスPublished - 2013
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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