A wake-up switch using a piezoelectric differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

本文言語English
ホスト出版物のタイトルProceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing
ホスト出版物のサブタイトルSensing the Future, ISSNIP 2013
ページ23-26
ページ数4
DOI
出版ステータスPublished - 2013 8 9
外部発表はい
イベント2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 - Melbourne, VIC, Australia
継続期間: 2013 4 22013 4 5

出版物シリーズ

名前Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
1

Conference

Conference2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
CountryAustralia
CityMelbourne, VIC
Period13/4/213/4/5

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Information Systems

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